使用感应电荷位敏阳极的极紫外单光子计数成像系统  

Extreme ultraviolet single photon-counting imaging system based on induced charge position-sensitive anode

作　　者：尼启良[1] 何玲平[1] 刘世界[1] 董宁宁[2] 陈波[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院苏州生物医学工程技术研究所,江苏苏州215163

出　　处：《光学精密工程》2010年第12期2543-2548,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.40774096;10878004;61077016)

摘　　要：研制了用于月基极紫外成像相机的二维极紫外位敏阳极光子计数成像探测器原型样机,该探测器系统主要由工作在脉冲计数模式下的微通道板堆、楔条形感应位敏阳极及相关的模拟和数据处理电路组成。设计和制备了周期为1.5mm,有效直径为47 mm的三电极楔条形位敏阳极,研制了最高计数率为200 kHz的前端模拟和数字电路。测量了探测器的暗计数率、脉冲高度分布、增益、线性及空间分辨率等工作特性。测量结果表明,探测器的空间分辨率为7.13 lp/mm(即0.14 mm),满足月基极紫外相机对空间分辨率的要求。A new prototype of two-dimensional photon-counting imaging system with an induced charge position-sensitive anode in extreme ultraviolet（EUV） region was developed for a moon-based EUV camera.The detector system is mainly composed of microchannel plate（MCP） stacks operating in a pulse-counting mode,a wedge-strip induced-charge position-sensitive anode and correlative analog and data processing circuits.A three-electrode wedge-strip induced-charge position-sensitive anode with a 1.5 mm period and a 47 mm diameter active area was designed and fabricated,and the front-end analog and data circuits with the maximum counting rate of 200 kHz were also developed.The operating characteristics of the prototype MCP detector including the background rate,pulse height distribution,gain,image linearity and the spatial resolution were measured.The measured results show that the spatial resolution has been 7.13 lp/mm（0.14 mm）,which means it can completely satisfy the requirement of moon-based EUV camera for the spatial resolution.

关 键 词：极紫外探测器 光子计数成像探测器 微通道板 感应电荷 楔条形位敏阳极 

分 类 号：V447.3[航空宇航科学与技术—飞行器设计] TH724[机械工程—仪器科学与技术]