基于近场声悬浮的非接触式直线型压电作动器  

Non-contact Linear Piezoelectric Actuator Based on Near-field Acoustic Levitation

作　　者：孙运涛[1] 陈超[1] 

机构地区：[1]南京航空航天大学,南京210016

出　　处：《中国机械工程》2010年第24期2952-2956,共5页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(10604032;50735002)

摘　　要：针对近场声悬浮(NFAL)传输在航空航天、高纯度材料加工以及微机电系统装配操作等领域的良好应用前景,设计出了非接触式直线型压电作动器。该作动器依靠兰杰文振子的振动,产生高声强声场来悬浮并驱动物体沿行波方向运动。先通过动力学分析和结构设计,试制出了一对兰杰文振子样机,并通过实验获得了其动态特性参数;然后,成功制造出了基于NFAL的非接触式直线型压电作动器,此作动器可悬浮传输的最大单位面积质量为3.06g。Realizing the good prospect of NFAL in application in the fields of aerospace engineering,material science,production line of high purity material and micro-machine assembly,a non-contact linear piezoelectric actuator was designed herein.This actuator,which operated by the acoustic field with high intensity generated by vibration of a Langevin-type transducer,can suspend and transport the objects along the direction of the traveling wave of linear plate.Firstly,through dynamic analysis and structure design,a couple of Langevin-type transducers were manufactured and their dynamic characteristic parameters were measured.Finally,non-contact linear piezoelectric actuator based on NFAL was produced successfully,the maximum unit area weight of which can suspend and transport is 3.06g.

关 键 词：声悬浮 近场声悬浮 压电 直线型作动器 

分 类 号：O42[理学—声学] TB552[理学—物理]