我国微机械技术发展概述  

The Development Summarizing of Micro-electromechanical System in Our Country

作　　者：路明[1] 赵则祥[1] 王长路[2] 

机构地区：[1]中原工学院,郑州450007 [2]郑州机械研究所,郑州450052

出　　处：《中原工学院学报》2010年第6期64-67,75,共5页Journal of Zhongyuan University of Technology

摘　　要：从微机械技术基础理论研究、微机械制造工艺、微装配技术等方面阐述了我国微机械技术的研究概况.以微机械技术在航空、航天、国防等领域应用的2个方面——微飞行器和皮、纳卫星为例,阐述了我国微机械技术与美国等发达国家的差距.指出了微机械技术的发展趋势及微机械技术发展所面临的科学难题.The study survey of MEMS in our country is expounded from the MEMS basic theory study,the MEMS manufacturing process,the microassembly technology and so on.And the main gap in MEMS between our country and developed countries,which includes American and others,is elaborated from the micro air vehicle,the picosat and the nanosat,which are two aspects that the MEMS is applied in fields of the aviation,the spaceflight,the national defence and the like.The developing trend of MEMS and a hard topic that is being faced in course of MEMS developing are elucidated.

关 键 词：微机械技术 研究概况 发展趋势 尺度效应 

分 类 号：TH16[机械工程—机械制造及自动化]