Bi_2O_3对CBS系LTCC性能的改进分析  

Improvement of LTCC properties of CBS series using Bi_2O_3

作　　者：郝永德[1] 李坤[1] 吴兆春[1] 

机构地区：[1]华中科技大学电子科学与技术系,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2011年第2期105-107,共3页Journal of Huazhong University of Science and Technology(Natural Science Edition)

摘　　要：采用CBS(CaO-B2O3-SiO2)系微晶玻璃,从玻璃添加剂的配方着手,结合差热分析、X射线衍射仪(XRD)图谱、介电常数等测试数据,在保证玻璃/氧化铝陶瓷基板具备良好性能的基础上,实验研究了Bi2O3对降低烧结温度、提高致密性等方面的作用.设计出一套性能良好的低温共烧陶瓷(LTCC)原料配方和烧结工艺,其烧结温度为830℃、密度为3.0g/cm3、收缩率为17.6%;低频(1kHz)下介电常数ε≤9.7、介电损耗正切tanδ≤5.7×10-3,高频(10GHz)下介电常数ε≤7.3、介电损耗正切tanδ≤4.9×10-3.Effects of Bi2O3 on reducing the sintering temperature and energy consumption and increasing the density were studied experimentally when CBS （CaO-B2O3-SiO2）series glass-ceramics were used and differential thermal analysis, XRD, dielectric constant and other test data were exploited, under keeping the glass/Al2O3 ceramic substrate with good properties. LTCC （low temperature cofired geramics） substrate material composition with good performance and its eintering process were designed, in which the sintering temperature was 830℃, the density was 3.0 g/cm3 , the shrinkage rate was 17.6%, the dielectric constant was less than 9.7 and the dielectric loss tangent was less than 5.7×10^-3 at 1 kHz, the dielectric constant was less than 7.3 and dielectric loss tangent was less than 4.9×10^-3 at 10 GHz.

关 键 词：玻璃陶瓷 烧结 介电性能 致密性 氧化铋 玻璃/氧化铝 

分 类 号：TQ171.1[化学工程—玻璃工业]