大口径光学元件磁流变抛光工艺软件设计  

Control software development for magnetorheological finishing of large aperture optical elements

作　　者：郑楠[1] 李海波[1] 袁志刚[1] 钟波[1] 

机构地区：[1]成都精密光学工程研究中心,成都610041

出　　处：《强激光与粒子束》2011年第2期419-422,共4页High Power Laser and Particle Beams

基　　金：中国工程物理研究院科学技术基金项目(2004Z0304)

摘　　要：基于磁流变抛光机理,采用简森-范锡图特法求解驻留时间函数以确定磁流变抛光工艺软件的核心算法设计,开展工艺软件全过程模块化、流程化设计,进行功能模块测试。软件开发过程中兼顾各功能模块间关系耦合,并完成工艺软件的代码集成测试。开展500 mm口径的微晶平面反射镜的验证实验,结果表明元件面形值获得快速有效收敛。证实了所设计的工艺软件能够精准地指导大口径光学元件的磁流变加工。Based on the mechanism of magnetorheological finishing,the dwell time function was solved by Jansson-Van Cittert algorithm to accomplish the kernel module design.Then the software modularization programming,modular testing and integration testing were conducted.A verification experiment was carried out on a crystal element with full aperture of 500 mm and the element＇s surface achieved rapid and efficient convergence after the software controlled magnetorheological finishing.It is proved that the software could control the whole polishing process accurately.

关 键 词：磁流变抛光 计算机控制抛光 去除函数 驻留时间 面形精度 

分 类 号：TH161[机械工程—机械制造及自动化]