多级罗茨干泵泵内传热与变形的计算和实验研究  

Calculation and Measurement of Internal Heat Transfer and Deformation of Multi-Stage Roots Dry Vacuum Pump

作　　者：刘坤[1] 巴德纯[1] 王光玉[2] 张振厚[2] 杨乃恒[1] 

机构地区：[1]东北大学机械工程与自动化学院,沈阳110819 [2]中国科学院沈阳科学仪器研制中心有限公司,沈阳110168

出　　处：《真空科学与技术学报》2011年第1期100-104,共5页Chinese Journal of Vacuum Science and Technology

基　　金："十一五"国家科技重大专题项目(2009ZX02014);国家自然科学基金资助项目(50806009);教育部博士点基金课题(20070145081);中央高校基本科研业务专项资金(N100403006)

摘　　要：间隙设计是多级罗茨干泵设计的重要参数之一。在多级罗茨干泵运转时,间隙受转子和泵腔热变形的影响较大。本文通过分析了多级罗茨干泵内部的传热过程,建立了工作过程的传热模型。通过接触式和非接触式测温方法,对多点温度进行了测量,获得了热载荷的边界条件。基于ANSYS软件,对泵体及转子轴在稳定运转时的温度场进行了分析,并采用热-结构耦合分析对其热变形进行了计算,得到转子轴和泵腔的热变形量,并绘制了变形云图和曲线。通过上述方法得到的热变形数据,为确定间隙提供了参考,并为进一步计算干泵在运行时的间隙泄漏量提供了计算依据。The operation-produced internal heat transfer and deformation of the multi-stage Roots dry vacuum pump were modeled,calculated and experimentally studied.First,the boundary conditions of the temperature distribution were obtained by sampling the temperature at key points in the rotors and on the pump walls in the contact and non-contact methods.Next,the temperature field of the pump in steady operation was evaluated with the ANSYS software package.And finally,the thermal deformation of the rotor axis and the pump body was calculated;the deformation contours and curves were plotted,respectively.Possible applications of the analytical and experimental results in gearing clearance design and leakage evaluation were also tentatively discussed.

关 键 词：多级罗茨干泵 热变形 热-结构耦合 间隙 温度测量 

分 类 号：TK124[动力工程及工程热物理—工程热物理]