平板式压电四维力/力矩传感器的研究与开发  

Research and development of a parallel piezoelectric 4-axis force/torque sensor

作　　者：刘俊[1] 秦岚[1] 刘京诚[1] 李敏[1] 薛联[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044

出　　处：《重庆大学学报（自然科学版）》2011年第2期101-107,共7页Journal of Chongqing University

基　　金：高等学校博士学科点专项科研基金资助项目(20100191110011);重庆市2010年工业发展专项资金资助项目;中央高校基本科研业务费资助项目(CDJXS11122220;CDJXS11121145)

摘　　要：针对弹性体式多维腕力传感器存在的瓶颈矛盾,提出了一种新型平板式压电四维力/力矩传感器。介绍了传感器的结构和工作原理,讨论了石英晶片组的选型和空间分布形式。推导出了传感器的数学模型,建立了传感器的有限元模型,并加工出了传感器实物。得到了传感器力/力矩输入与电压输出之间的关系曲线、电压灵敏度、电荷灵敏度、维间干扰等重要指标。结果表明:传感器结构简单合理、数学模型正确、加工工艺性好、线性度好、刚度高、固有频率大于30kHz、未使用退耦矩阵时的维间干扰小于3%。满足传感器的设计指标。This paper proposed a novel parallel piezoelectric four-axis force/torque sensor based on the bottleneck contradictions of elastic style multi-axis wrist force sensor,It introduces the sensor＇s structure and operating principle and discussed the selection and spatial layout of piezoelectric quartz wafer group.Then it derives the mathematic model of the sensor.The finite element model of the sensor is established,and the prototype of the sensor is manufactured.Finally,it obtains the input and output curve,voltage sensitivity,charge sensitivity and the coupling interference.The results indicate that the sensor has advantages of simple and rational structure,correct mathematic model,nice manufacturability,good linearity,good rigidity,and natural frequency greater than 30 kHz,less than 3% of the interference error without decoupling matrix.These can meet the requirements of sensor design.

关 键 词：压电传感器 力/力矩传感器 有限元 四维 

分 类 号：TH71[机械工程—测试计量技术及仪器]