电化学腐蚀法制备倒锥状微细电极的试验研究  

Experimental Investigation on Fabrication of Inverted Cone-shaped Micro-electrode by Using Electrochemical Machining

作　　者：谢岩甫[1] 刘壮[1] 陈伟[1] 

机构地区：[1]南京航空航天大学/江苏省精密与微细制造技术重点实验室,江苏南京210016

出　　处：《电加工与模具》2011年第1期18-22,共5页Electromachining & Mould

基　　金：国家自然科学基金并且项目(50635040)

摘　　要：以电化学腐蚀加工法为基础,提出了一种加工复杂形状微细电极的工艺方法。利用端面绝缘的方法改变阳极的局部导电性,使阳极和阴极之间的电场分布发生变化,从而得到倒锥状微细电极。通过试验成功地制备出倒锥状微细电极,并结合对比圆柱状电极进行了微孔电解加工试验,结果证明倒锥状电极在微孔电解加工中能获得更好的加工定域性。A new process of producing complex shape micro-electrode was proposed based on electrochemical etching principle.The electric field distribution between the anode and cathode was changed by insulation on the end of the anode, which can influence the local conductivity of the anode,thus the complex shape micro-electrode will be produced.In this paper,the inverted cone-shaped micro-electrode has been successfully fabricated by using this method,and through the experimental study on micro-hole electrochemical machining using cylindrical and inverted cone electrode,proved that the inverted cone electrode could achieve much higher machining locality in micro-ECM.

关 键 词：电化学腐蚀 微细电解加工 微细电极制备 加工定域性 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]