激光直写技术在微电极阵列制作中的应用研究  

Research on fabrication of multi-electrode arrays by direct laser technology

作　　者：陈海峰[1,3] 曹宇[2] 李祥友[2] 蔡志祥[2] 王小宝[2] 王少飞[2] 李金洪[2] 曾晓雁[2] 陈弘达[1] 

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083 [2]华中科技大学激光加工国家工程研究中心,武汉430074 [3]华东医学生物技术研究所,南京210002

出　　处：《高技术通讯》2011年第2期210-214,共5页Chinese High Technology Letters

基　　金：863计划（2007AA030114,2007AA04Z254,2007AA04Z329）资助项目.

摘　　要：利用激光微细熔覆电子浆料（LMCEP）技术在熔融石英玻璃上初步制作了4×4微电极阵列（MEA）——目前研究细胞电生理的常用工具之一，在电极阵列背面利用微笔直写技术直接“写”上加温和热敏电阻，完成了微电极阵列、电热器件和热敏器件的集成制造。随后对电极阻抗和微加热器性能进行了测试，并在其上培养神经细胞。结果表明：激光直写导线宽度与加工电流、光阑直径、电子浆料、涂层厚度和衬底材料相关；电极和微加热器性能基本满足使用需求，但是电子浆料成分对细胞生物活性存在一些影响。今后将更换电子浆料材料，提高生物相容性。A 4 × 4 multi-electrode array （MEA）, one of the most useful tools for research on the cell electrophysiology, was fabricated on fused quartz using the laser micro-cladding electronic paste （LECEP） technology, and the heater resistance together with the heat sensitive resistance were painted on the backside of the glass by using the micro-pen technology, thus the integration of the micro-electrodes, the electrical heat apparatus and the heat sensitive apparatus was completed. The impedance of the micro-electrodes and the pefformance of the heater were tested, and then neural cells were cultured on the MEA. The results showed that the line width was correlated to the current, the diameter of diaphragm, the electronic plasma material, the thickness of electronic paste, and the substrate material. The performance of the MEA and the micro heater was primarily meeting the requirement. Because the component of the electronic plasma material is a little harmful to the cells activity, the further study will aim at replacing the material to ensure the biocompatibility.

关 键 词：微电极阵列(MEA) 激光微细熔覆电子浆料(LMCEP)技术 微笔直写技术 

分 类 号：TN405[电子电信—微电子学与固体电子学]