Scanning near-field acoustic microscope and its application  

作　　者：XU Ping,CAI Wei & WANG RongMing Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) Department of Physics,Beihang University,Beijing 100191,China 

出　　处：《Science China(Technological Sciences)》2011年第1期126-130,共5页中国科学（技术科学英文版）

基　　金：supported by the National Natural Science Foundation of China (Grant Nos.50971011 and 10874006);Beijing Natural Science Foundation (Grant No.1102025);Research Fund for the Doctoral Program of Higher Education of China (Grant No.20091102110038)

摘　　要：Scanning near-field acoustic microscope （SNAM） combines the ultrasonic detection technology with scanning near-field microscopy. The main characteristic of such microscope is that the acoustic wave is produced or detected in near-field area whether ultrasonic transducer acts as generator or detector. The resolution of SNAM can reach to nanometer scale. First, two typical SNAMs, scanning electron acoustic Inicroscope and scanning probe acoustic microscope, will be introduced in this paper. The working principle of our homemade SNAM based on a commercial scanning probe microscope will be reported, together with some recent results from this homemade SNAM.

关 键 词：scanning near-field acoustic microscope ultrasonic detection technology scanning probe microscopy 

分 类 号：TH742[机械工程—光学工程]