一种基于AFM的金刚石刀具刃口锋利度的检测方法  

A Measuring Method for Blade Sharpness of Diamond Tools Based on AFM

作　　者：张晓峰[1] 王宝瑞[2] 杜文浩[2] 刘兴宝[2] 

机构地区：[1]中国工程物理研究院机械制造与工艺研究所,四川省绵阳市硕士研究生621900 [2]中国工程物理研究院

出　　处：《工具技术》2011年第2期120-125,共6页Tool Engineering

摘　　要：金刚石刀具刃口纳米级别的锋利度是影响超精密加工表面质量特别是表面微观几何形貌的重要因素。针对目前测量中存在的问题,介绍了一种新的使用原子力显微镜(Atomic Force Microscope,AFM)进行金刚石刀具刃口锋利度检测的方法,该方法首先利用仿射变换进行截面数据提取,然后利用一种基于曲率的算法求出圆弧拟合点,最后进行了带约束的圆弧拟合,并给出了单截面钝圆半径的计算结果和误差分析。计算结果表明,该方法具有较高的计算精度,与一般圆评定方法相比更加真实地反映刃口轮廓情况。The nanometer level sharpness of diamond tools has been found to be an important factor affecting surface quality especially surface morphology of micro geometric on arultra - precision machining. This paper introduces a new method based on Atomic Force Microscope （AFM） to mesure the sharpness of diamond tools. First we use the method of affine transform to extract data, then using the algorithm based on a circular arc curvature to fit point, at last doing some work on constrained arc fitting, and giving a single section obtuse radius and the error analysis of the calculation results. The calculation results show that this methbd has higher preeisionand and are more truly reflect the contour than generally round evaluation method.

关 键 词：金刚石刀具 锋利度 原子力显微镜 

分 类 号：TG711[金属学及工艺—刀具与模具]