收缩管/扩张管型无阀压电微泵的动态特性研究  

STUDY ON DYNAMIC CHARACTERISTICS OF A PIEZOELECTRIC VALVE-LESS NOZZLE/DIFFUSER MICROPUMP

作　　者：蒋丹[1] 李松晶[2] 杨平[1] 

机构地区：[1]电子科技大学机电学院,成都611731 [2]哈尔滨工业大学机电学院,哈尔滨150001

出　　处：《工程力学》2011年第3期218-223,共6页Engineering Mechanics

基　　金：教育部留学回国基金项目(24403604);浙江大学流体传动及控制国家重点实验室开放基金项目(GZKF-2007002)

摘　　要：为了合理地预测收缩管/扩张管型无阀压电微泵泵腔压力脉动,利用流体动力学基本理论以及锥管的特点,给出了无阀微泵的动态数学模型,包括吸入和泵出模式的连续性方程以及泵腔体积变化。采用有限元分析方法,对振动薄膜的最大体积变形量进行了计算。基于微泵动态数学模型,对无阀微泵压力和流量特性进行了仿真研究,分析不同薄膜最大体积变形量和振动频率对微泵动态特性的影响。同时,采用安装在泵腔上的压阻式微型压力传感器完成微泵泵腔压力脉动测试。通过对仿真结果和试验结果的分析比较,表明微泵动态数学模型用于计算无阀微泵动态压力特性是可行的。In order to predict the pressure pulsation in a piezoelectric valve-less nozzle/diffuser micropump according to fluid dynamics and cone tube characteristics,the dynamic mathematical models of the valve-less micropump are developed considering the mode continuity during supply and pump and the volume change of pump chamber.Using finite element method,the maximum volumetric deflection of vibrated diaphragm is calculated.Based on the micropump dynamic mathematical model,the pressure and flow characteristics are simulated to analyze the effects of maximum volumetric deflection of different diaphragm and vibration frequency on the dynamic characteristics of micropump.A piezoresistive micro pressure transducer fitted on the top of the chamber is used to measure the pressure pulsations in the pump chamber.A comparison between simulation results and experimental data shows that the micropump dynamic mathematical model is capable of predicting the pressure pulsations in valve-less micropump.

关 键 词：流体动力学 微泵 压力脉动 动态特性 微型压力传感器 

分 类 号：TH137.51[机械工程—机械制造及自动化]