硅烷热分解法制取工业硅的影响因素分析  

THE INFLUENCE FACTORS OF SILANE PYROLYSIS TO PRODUCT INDUSTRIAL GRADE SILICON

作　　者：邓寅生[1] 刘少辉[1] 文广超[1] 许江涛[1] 黄研[1] 

机构地区：[1]河南理工大学资源环境学院,河南焦作454003

出　　处：《能源环境保护》2011年第1期16-18,22,共4页Energy Environmental Protection

摘　　要：现阶段制备工业硅所用的改良西门子方法存在能耗高和污染重的问题,因此寻求能耗低、环境友好型工业硅制备方法是必然趋势。通过硅烷分解实验对硅烷热分解法制备工业硅的几个影响因素做了分析,并简要讨论了各个因素对硅烷热分解的影响。得出硅烷热分解的最佳条件是硅烷浓度0.25%,载气流量为200 L/h,分解温度850℃,分解压强0.35kPa。在此条件下硅的沉积率89.3%。At present the preparation of industrial grade silicon modified Siemens method exists serious energy consumption and pollution problems.It is the inevitable trend that searching low energy consumption and environmental friendly method to product industrial grade silicon silicon.So the factor of silane pyrolysis to product industrial grade silicon are analyzed in this paper,and the effect of various factors of Silane pyrolysis to Silicon deposition rates was briefly discussed.The optimal factor as follows： Silane concentration 0.25%,carrier gas flows 200 l/h,decomposition temperature 850 ℃,decompose pressure 0.35 KPa.In this condition,the Silicon deposition rate is 89.3%.

关 键 词：硅烷 热分解 工业硅 

分 类 号：X703[环境科学与工程—环境工程]