具有宽调谐范围的微纳光机电系统可调谐垂直腔面发射激光器研究  

Micro-nano-optical machine system tunable wavelength vertical cavity surface emitting lasers with wide tunable range

作　　者：关宝璐[1] 张敬兰[1] 任秀娟[1] 郭帅[1] 李硕[1] 揣东旭[1] 郭霞[1] 沈光地[1] 

机构地区：[1]北京工业大学,光电子技术省部共建教育部重点实验室,北京100124

出　　处：《物理学报》2011年第3期262-265,共4页Acta Physica Sinica

基　　金：国家重点基础研究发展计划(批准号:2006CB604902);国家自然科学基金(批准号:60908012)资助的课题~~

摘　　要：基于微纳机械技术设计得到了可调谐垂直腔面发射激光器结构,将具有Al0.8Ga0.2As牺牲层结构的DBR反射镜制备成微纳光机电系统,并与多量子阱有源区光纵向耦合结构相结合.其中,微纳光机电DBR结构不再是简单的分布布拉格反射镜,而是对光波具有高调制作用的可动微纳机械反射镜系统,并在静电力作用下可以动态调谐VCSEL谐振腔的激射波长.实验结果显示,当激光器调谐电压从0V增加到7V时,对应激射波长将从968.8nm蓝移到950nm,整个调谐范围达到了18.8nm,可调谐VCSEL器件表现出了优异的激光特性,并实现了波长连续可调.The stucture of tunable vertical cavity surface emitting laser is obtained based on the micro-nano-mechanical technology. The DBR reflector with Al0. 8 Ga0. 2 As sacrificial layer consisted the micro-nano reflector systerm,which combines with the multi-well active region coupled structure. In addition,the structure of micro-nano-optical machine system is not only the DBR reflector,but also serves to tune the wavelength of lasing by the electrostatic force. Good laser characteristics are obtained with continuous tuning ranges over 18. 8 nm near 968. 8 to 950 nm for 0—7 V tuning bias.

关 键 词：垂直腔面发射激光器 微纳光机械 波长可调谐 

分 类 号：TN248[电子电信—物理电子学]