射频功率对辉光放电聚合物结构和性能的影响  

Influence of RF power on the structure and properties of glow discharge polymer

作　　者：闫建成[1,2] 何智兵[1] 阳志林[1] 张颖[1] 唐永建[1] 韦建军[2] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,绵阳621900 [2]四川大学原子与分子物理研究所,成都610065

出　　处：《物理学报》2011年第3期481-485,共5页Acta Physica Sinica

摘　　要：采用辉光放电技术,利用三倍频射频电源制备了不同功率下的辉光放电聚合物(GDP)涂层.并对GDP涂层进行了傅里叶变换红外吸收光谱(FT-IR)和元素分析仪表征,讨论了功率变化对其内部结构的影响.利用热重法(TG)表征了GDP涂层在30—650℃范围内的热稳定性.结果表明:随着射频功率的提高,GDP涂层的沉积速率增大;SP3CH3和联结甲基的乙烯基强度明显减小,SP3CH2,SP2CH2和不联结甲基的乙烯基强度增加,H含量降低,C=C键增多;热稳定性增强.Using trans-2-butene and hydrogen as the precursor,the glow discharge polymer films was successfully coated on KBr discs by glow discharge polymerization at different powers. The chemical structure,thermal stability of the GDP films and the deposition rate of GDP films were characterized by the FT-IR,TG and surface profiler technology. The Results show that the deposition rate,the olefinic structure,the ratio of C /H,a nd the content of C=C in GDP films increase with the RF power increasing. The thermal stability of GDP films fabricated at higher RF power is better.

关 键 词：GDP涂层 红外吸收谱 热稳定性 射频功率 

分 类 号：O461.21[理学—电子物理学]