超导纳米线单光子探测器  

Fabrication of superconducting nanowire single-photon detector

作　　者：张蜡宝[1] 康琳[1] 陈健[1] 赵清源[1] 郏涛[1] 许伟伟[1] 曹春海[1] 金飚兵[1] 吴培亨[1] 

机构地区：[1]南京大学电子科学与工程学院超导电子学研究所,南京210093

出　　处：《物理学报》2011年第3期790-796,共7页Acta Physica Sinica

基　　金：国家重点基础研究发展计划(批准号:2011CBA00200;2007CB310404);国家自然科学基金(批准号:10874074)资助的课题~~

摘　　要：利用磁控溅射、电子束光刻和反应离子刻蚀等微加工技术,开展了超导纳米线单光子探测器(SNSPD)的研究.通过对SNSPD的设计和制备工艺参数的优化,成功制备出了高质量的SNSPD.单光子检测实验表明,制备的SNSPD对660nm波长的光信号,系统检测效率可达30%,对1550nm波长光信号,最大系统检测效率为4.2%.在平均暗计数小于10c/s的情况下,系统检测效率大于20%(660nm)和3%(1550nm).In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors （SNSPD）. Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4. 2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c /s,the detection efficiencies were 20% （660 nm） and 3% （1550 nm） with the SNSPD fabricated with above mentioned methods.

关 键 词：单光子 氮化铌 纳米线 探测器 

分 类 号：O572.212[理学—粒子物理与原子核物理]