使用长脉冲高能激光对石英玻璃打孔  

Experiment of long pulse high energy laser drilling on silica glass

作　　者：戴罡[1] 陆建[1] 刘剑[1] 张梁[1] 倪晓武[1] 

机构地区：[1]南京理工大学理学院应用物理系,江苏南京210094

出　　处：《光学精密工程》2011年第2期380-386,共7页Optics and Precision Engineering

基　　金：江苏省创新基金资助项目(No.AD20286)

摘　　要：为了实现玻璃上的高效快速打孔,研究了使用长脉冲激光在石英玻璃上打孔的方法。通过在玻璃表面镀制ZrO2,解决了石英玻璃对1 064 nm激光吸收弱的问题。使用脉宽为1 ms、波长为1 064 nm的Nd∶YAG激光在石英玻璃上打出了深为1.55 mm的锥形孔。研究了激光打孔的能效比,结果显示,当激光的能量密度为6.8 kJ/cm2左右时,打孔的效能比最大,并分析了可能的原因。根据膜层及基底的吸收系数随温度增加而增加的特性,分析了形成锥形深孔的机理。采用在玻璃的双面都增加吸收层的方法,在玻璃上加工出柱状通孔。最后,分析和讨论了吸收层的热学性质和光学性质对打孔的影响,为提高打孔效率提供了设计方案。实验结果表明,使用单脉冲ms激光能够高效地在玻璃上打出小深孔,为提高玻璃打孔效率提供了新的思路。In order to improve the drilling efficiency of glass,a drilling hole method in the glass with a long pulse laser was investigated.ZrO2 was deposited onto the glass to increase the absorption at 1 064 nm.A cone shaped hole with a depth of 1.55 m was obtained by using a Nd∶YAG laser with a pulse duration of 1 ms.The efficiency of drilling holes were studied,which shows that the efficiency reaches the maximum value when the energy density equals 6.8 kJ/cm2.Then,the possible reasons were analyzed.The mechanisms of forming the cone shaped cavity were discussed by considering the property of absorption coefficient of glass that increases with the temperature.The cylindrical holes were obtained in the glass by adding absorption materials on both sides of the glass.Finally,the effects of thermal and optical properties of the absorption layer on the drilling holes were discussed to improve the drilling efficiency.The experiment results show that the single pulse ms laser can drill holes in glass by deposition absorption layers,which provides a new way for improving the drilling efficiency.

关 键 词：激光打孔 高能激光 长脉冲激光 石英玻璃 

分 类 号：TN249[电子电信—物理电子学]