折-衍光学镜片的单点金刚石车削与检测  

Single-Point Diamond Turning and Testing of Hybrid Diffractive-Refractive Optical Lens

作　　者：梁旭[1] 王军华 徐敏[1] 李锦江 李旭峰 

机构地区：[1]复旦大学教育部微纳光子结构重点实验室,光科学与工程系,上海200433 [2]上海现代先进超精密制造中心有限公司,上海200438

出　　处：《激光与光电子学进展》2011年第3期59-63,共5页Laser & Optoelectronics Progress

摘　　要：讨论了折-衍光学镜片的设计、加工和检测。结合设计采用单点金刚石车削工艺加工出了具有连续浮雕结构的折-衍光学镜片。对加工成的折-衍光学镜片采用先进的数字化检测,结果表明,面型精度为0.228μm,表面粗糙度为1.279 nm,台阶位置误差小于1/3波长。对折-衍光学镜片加工中产生的遮挡效应和光的透过率损失给出了定量的分析结果。The optical design, fabrication and testing of hybrid diffractive-refractive optical lens are discussed. A hybrid lens with continuous structure is fabricated using single-point diamond turning according to the design. Advanced digital testing methods are utilized for testing the hybrid lens. The testing result shows that, the profile accuracy is 0. 228 μm, the surface roughness is 1. 279 nm, and position error of step is less than one third of the wavelength. Quantitative analysis of transmission blockage and transmission loss of light of hybrid diffractiverefractive lens is given.

关 键 词：光学器件 二元光学 折-衍混合镜片 单点金刚石车削 检测 

分 类 号：O436.1[机械工程—光学工程]