脉冲磁控溅射制备树脂镜片红外防护功能薄膜  

Anti-IR Films of Resin Lens Prepared by Pulse Magnetron Sputtering

作　　者：冯海华[1,2] 胡川[1,2] 陈娇洁[1,2] 王媛媛[1,2] 厉以宇[1,2] 

机构地区：[1]温州医学院眼视光学院卫生部视觉科学研究重点实验室,浙江温州325027 [2]温州医学院附属眼视光医院,浙江温州325027

出　　处：《激光与光电子学进展》2011年第3期98-102,共5页Laser & Optoelectronics Progress

基　　金：浙江省科技计划(2009C31136)资助课题

摘　　要：选取氮化硅和二氧化硅作为薄膜材料，借助膜系设计软件对膜系结构进行优化，采用中频脉冲磁控溅射技术进行薄膜制备。利用高反膜透射曲线拟合方法调整薄膜的实际沉积速率，减少膜厚控制误差，在树脂镜片CR39基底的凸面和凹面上分别镀制了符合设计要求的红外防护膜和可见光减反膜。镀膜后树脂镜片在420～680nm的平均透过率大于95％，在近红外800～1400nm波段的平均透过率小于60％，薄膜性能稳定，能够满足红外防护树脂镜片的日常使用需要。SiO2 and Si3N4 are chosen as coating materials. The structure of thin films is optimized by using software. Mid-frequency pulse magnetron sputtering is adopted to prepare the films. Deposition rate is calibrated by fitting the measured transmittivity curve of high-reflective thin films, which improves the precision of film thickness monitoring. The anti-IR films and visible light anti-reflective films are successfully deposited on the convex and concave suface of CR39 resin lens respectively. At normal incidence angle, the average transmittivity of the resin lens after coating is more than 95% at 420-680 nm, and is less than 60% at 800-1350 nm, which meets the infrared protective resin lenses need for daily use.

关 键 词：薄膜 红外防护膜 中频脉冲磁控溅射 树脂镜片 

分 类 号：O484[理学—固体物理]