具有激振和测振的新型压电微悬臂梁设计  

Design of Novel Piezoelectric Microcantilevers with Self-Actuating and Self-Detection

作　　者：王锡明[1] 周嘉[2] 黄宜平[2] 

机构地区：[1]合肥学院机械系,安徽合肥230022 [2]复旦大学专用集成电路与系统国家重点实验室微电子学系,上海200433

出　　处：《复旦学报（自然科学版）》2010年第6期674-680,695,共8页Journal of Fudan University：Natural Science

基　　金：国家自然科学基金(60876085)资助项目

摘　　要：设计了几种新型压电微悬臂梁结构,目的是实现微悬臂梁同时具有激振和测振功能.设计的微悬臂梁尺寸(长×宽×厚)为860μm×300μm×2.11μm;设计了4种可以同时实现激振和测振功能的上电极形状;分析了上电极与信号传递函数值的关系,并对微悬臂梁进行了静态响应、模态分析和谐响应分析.可以看到采用Ⅱ型上电极设计的微悬臂梁既可以实现激振和测振功能,同时具有最佳的静态灵敏度和较高的品质因子,为优化的设计结构.Several piezoelectric microcantilevers are designed for realizing self-actuating and self-detection of vibration.The dimensions of the microcantilver are 860μm in length×300μm in width×2.11μm in thickness.Four types of top electrode are proposed for self-actuating and self-detection.The relationship between the value of transfer function and the shape of electrode is analyzed.Static responses,modal analysis and harmonic analysis are conducted with FEA.The results show that the microcantilevers with top electrode of type Ⅱ have the best static sensitivity and relatively higher quality factor,which will be the optimized design.

关 键 词：压电微悬臂梁 谐振传感器 优化设计模拟 锆钛酸铅 

分 类 号：TN384[电子电信—物理电子学]