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机构地区:[1]School of Materials Science and Engineering,Dalian University of Technology [2]Ministry of Education Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Dalian University of Technology
出 处:《Journal of Semiconductors》2011年第3期21-25,共5页半导体学报(英文版)
基 金:Project supported by the National Natural Science Foundation of China(No.50674018)
摘 要:Solar cells are currently fabricated from a variety of silicon-based materials.Now the major silicon material for solar cells is the scrap of electronic grade silicon(EG-Si).But in the current market it is difficult to secure a steady supply of this material.Therefore,alternative production processes are needed to increase the feedstock.In this paper,EBM is used to purify silicon.MG-Si particles after leaching with an initial purity of 99.88%in mass as starting materials were used.The final purity of the silicon disk obtained after EBM was above 99.995%in mass.This result demonstrates that EBM can effectively remove impurities from silicon.This paper mainly studies the impurity distribution in the silicon disk after EBM.Solar cells are currently fabricated from a variety of silicon-based materials.Now the major silicon material for solar cells is the scrap of electronic grade silicon(EG-Si).But in the current market it is difficult to secure a steady supply of this material.Therefore,alternative production processes are needed to increase the feedstock.In this paper,EBM is used to purify silicon.MG-Si particles after leaching with an initial purity of 99.88%in mass as starting materials were used.The final purity of the silicon disk obtained after EBM was above 99.995%in mass.This result demonstrates that EBM can effectively remove impurities from silicon.This paper mainly studies the impurity distribution in the silicon disk after EBM.
关 键 词:silicon refining electron beam melting metallurgical grade silicon solar grade silicon
分 类 号:TN304[电子电信—物理电子学]
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