非相干光反馈表面轮廓测量实验研究  

Experimental research on surface profile measuring system based on incoherent optical feedback

作　　者：凌进中[1] 马军山[1] 许炯[1] 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学技术》2011年第2期148-152,共5页Optical Technique

基　　金：上海市教委科研创新基金项目(09YZ223)

摘　　要：数值研究了非相干光反馈时半导体激光器输出功率随反馈系数的变化关系以及待测物体离焦量与反馈系数的关系。提出了基于非相干光反馈的表面轮廓测量系统,并实验验证了系统的可行性,完成了对一元硬币的二维平面扫描成像,并分析了实验结果中的误差以及可能影响测量结果的主要因素。Relationships between output power of laser diode and optical feedback coefficient,optical feedback coefficient and defocusing amount are numerically investigated.A novel surface profile measuring system based on incoherent optical feedback is proposed and examined in experiments,the two-dimension images of a one Chinese Yuan coin are gotten.Measurement errors and some significant factors that affect the result also are analyzed.

关 键 词：光学测量 非接触测量 光反馈 轮廓测量 

分 类 号：TN206[电子电信—物理电子学]