多模干涉型GaAs光功分器的研制  

Study and Fabrication of M M I Ga As Optical Pow er Splitter

作　　者：杨建义[1] 孙一翎[1] 周强[1] 王明华[1] 李江[2] 王义周 

机构地区：[1]浙江大学信息与电子工程系,杭州310027 [2]河北半导体研究所,石家庄050051

出　　处：《光学学报》1999年第8期1123-1129,共7页Acta Optica Sinica

基　　金：浙江省自然科学基金;浙江大学曹光彪高科技发展基金

摘　　要：采用导模传输分析法设计了多模干涉型１×４ 光功分器。根据所确定的器件结构参数， 结合器件设计和制作过程中可能遇到的因素， 详细分析了器件中自映像效应多模波导的宽度和长度、波导的折射率等结构参数对器件性能的影响。进行了多模干涉型 Ｇａ Ａｓ １×４ 光功分器的制作和测试。测试结果表明， 所研制的器件实现了１×４ 光功分器功能。针对实验过程和测试结果中遇到的问题进行了讨论， 并提出了进一步完善器件性能的方法。A 1 ×4 m ultim ode interference ( M M I) optical pow er splitter is designed bym eans of guided m odel propagation analysis. Considering the possible factors w hich w ouldinfluence the properties of the device in the procedure of designing and fabricating, the influ ence of the param eters w as analyzed, such as the w idth, the length and the index of w aveg uide, on the perform ance of the device. Then the M M Ioptical pow er splitter is fabricatedand m easured. The m easuring results show that the fuction of the fabricated device can berealized. In accordance w ith the problem s occured during the experim ent and m easurem ent,opinions and m ethods are presented to im prove the perform ance of the device.

关 键 词：集成光学 多模干涉 光功分器 砷化镓 

分 类 号：TN256[电子电信—物理电子学]