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作 者:汪传勇[1] 左然[1] Andrey Smirnov Kirill Mazaev
机构地区:[1]江苏大学能源与动力工程学院,镇江212013 [2]STR Group,St. Petersburg 194156,Russia
出 处:《人工晶体学报》2011年第1期83-87,共5页Journal of Synthetic Crystals
摘 要:在泡生法蓝宝石单晶生长中,单晶炉内的热场对晶体质量至关重要。本文首先对单晶炉的顶部热屏、环形加热器和炉底保温进行了改进,然后结合计算机数值模拟,对热场改进前、后晶体的轴向和径向温度梯度、晶体表面温度分布、加热器功率等进行分析对比。结果表明:改进后的倾斜热屏增强了单晶炉内的辐射传热,对已生长出的晶体起到了后热作用,降低了晶体内的热应力;对加热器和底部钼保温层的改进,减小了加热器与坩埚间的热阻,增强了炉内的保温作用,使加热功率降低了约8%。In sapphire crystal growth by Kyropoulos method,the thermal fields of the furnace have great influence on the crystal quality.By changing the radiation shield shape,heater position and thickness of the wall insulation,an optimization of the heat field was attempted.Through the numerical simulation of the thermal fields before and after optimization,the axial and radial temperature gradients,heater power and temperature distribution along the crystal surface were obtained.The axial heat transfer in the furnace was improved after the radiation shield was tilled,which played a role of after-heater,thus the thermal stress in the crystal was reduced.The thermal resistance between heater and crucible,and the Mo insulation in the bottom furnace were also reduced.After the optimization the energy savings of about 8% is obtained.
分 类 号:TN304[电子电信—物理电子学]
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