利用照相平板印刷术制作钢表面微米图形技术  

Micropatterning on Steel Surface by Using Photolithography

作　　者：任靖日[1] 蔡荣勲 

机构地区：[1]延边大学工学院,延吉133002 [2]韩国庆北大学摩擦学研究所

出　　处：《机械工程学报》2011年第3期124-128,共5页Journal of Mechanical Engineering

基　　金：国家自然科学基金资助项目(50765008)

摘　　要：采用微机电系统关键技术的照相平版印刷术,利用电化蚀刻术进行钢表面微米图形的摩擦学设计和制作以及不同蚀刻方法的基础研究;观察在不同电化蚀刻时间和图形密度下微米图形蚀刻深度和加工表面的变化规律,并分析他们之间相关关系。结果表明,控制电化蚀刻时间可获得不同面积的钢表面微米图形以及不同蚀刻深度的微米图形,而且其变化具有一定的规律。在金属材料表面微米图形加工中,照相平版印刷术加工方法与其他传统的加工方法相比具有微米图形清晰、表面质量好、便于控制图形形状以及可大量生产等优点。在高强度金属材料表面上加工微米图形中,照相平版印刷术具有便于加工不同形状、大小和深度的微米图形以及很好的适应性。Based on the photolithography of the key technique of micro-electromechanical systems（MEMS）,the electrochemical etching is used in tribology design and making of the micropatterning on surface of the steel and the different methods of etching are studied.The variation rule of the etch depth of micron-graphics and the variation of the processing surface at different electro-chemical etching time and the graphics density are observed and the relationship among them is analyzed.The results indicate that the different area of steel surface micron-graphics and the different depth of micron-graphics etching can be attained by controlling the electro-chemical etching time and it has a regular variation.Compared with the traditional machining methods,the electro-chemical etching technique has a clear micron-graphics,a good surface quality,convenient control for graph and an advantage of mass production under the processing of the micron graphics on the metal surface.Furthermore,it can process the micron-graphics of different shape,size and depth on most high-strength metallic material surface.

关 键 词：照相平版印刷术 微米图形 电化蚀刻术 摩擦学设计 

分 类 号：TN305.7[电子电信—物理电子学]