金属薄膜导线的亚微米局域电导率精确测量技术  

Methodology for Measurement of Submicron Metallic Wire's Local Electrical Conductivity by Applying Four-points AFM Probe Technique

作　　者：吴蕾[1] 葛耀峥[1] 居冰峰[1] 

机构地区：[1]浙江大学流体传动及控制国家重点实验室,杭州310027

出　　处：《机械工程学报》2011年第4期1-6,共6页Journal of Mechanical Engineering

基　　金：国家自然科学基金(90923031);国家高技术研究发展计划(863计划;2009AA04Z168);浙江省自然科学基金(R1080568)资助项目

摘　　要：作为薄膜器件最重要物理量之一的局域电导率的定量测定,能在保证性能、提高成品率、完善制作工艺等方面起关键作用。利用基于原子力显微镜(Atomic force microscope,AFM)的4电极微探针局域电导率测量技术,精确测量厚度为350nm、宽度分别为50.0μm、25.0μm、5.0μm、2.0μm及600nm、纯度为99.999%的铝薄膜导线的电导率。由于被测试件宽度和厚度方向的尺寸明显缩小且十分接近电极的最小间距,综合考虑电极尺寸、不同批次电极的加工精度和加工参数、4个电极间的位置误差等几个影响测量精度的因素,修正电导率的计算模型并将传统4电极电导率测量法的应用领域拓展到亚微米级微观尺度。试验结果证明基于AFM的4电极微探针技术在亚微米级局域电导率测量方面的能力。The quantitative measurement of electrical conductivity plays a key role in ensuring material performance,improving yield and fabrication process.The four-points AFM probe technique is applied for the purpose of quantitatively measuring local conductivities of the 99.999% aluminum wires and 350 nm thickness and different widths of 600 nm,2.0 μm,5.0 μm,25.0 μm and 50.0 μm.As position the width and thickness of the specimen is very close to the minimum distance of the electrodes,we consider the factors that affect the measurement accuracy,such as size,diversity of parameter and precision in processing and position error of the four-points AFM probe,modify the calculation model of conductivity and extend the traditional four-electrode conductivity measurements to the sub-micron level.The repeatability of conductivity measurements indicates that this four-point AFM probe technique could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.

关 键 词：亚微米金属薄膜导线 尺寸效应 局域电导率 4电极AFM技术 

分 类 号：TH706[机械工程—仪器科学与技术]