具有独立探头的3ω技术测量固体热导率  

Freestanding Sensor-Based 3ω Technique for Thermal Conductivity Measurement of Solids

作　　者：邱琳[1,2] 郑兴华[1,2] 苏国萍[1,2] 唐大伟[1] 

机构地区：[1]中国科学院工程热物理研究所,北京100190 [2]中国科学院研究生院,北京100039

出　　处：《工程热物理学报》2011年第4期621-624,共4页Journal of Engineering Thermophysics

基　　金：国家自然科学基金资助项目(No.50876103)

摘　　要：设计并制作了一种适用于3ω技术的独立探头。提出了利用基于这种独立探头的3ω技术进行固体热导率测量的原理和方法。与传统3ω技术相比,基于独立探头的3ω技术具有探测器使用寿命长、不再对样品表面有光滑要求的优势,并且实现了对样品热导率的无损测量。对几种标准样品的热导率进行测试的结果表明,基于独立探头的3ω技术在表征块状固体及几百微米厚晶片的热导率方面有很高的准确性,且在传统3ω技术不适用的材料(如具有多孔结构的样品)的热导率表征方面具有潜在的应用价值。A freestanding sensor based on 3ωtechnique was designed and fabricated.The principle and measurement method for thermal conductivity characterization of solids using this freestanding sensor-based 3ωtechnique was proposed.Compared with the conventional 3ωtechnique,the service life of the sensor is improved and the smooth surface of the specimen is no longer needed.Furthermore, the nondestructive thermal conductivity characterization for specimens based on the 3ωtechnique is first realized.Experimental results indicated the freestanding sensor-based 3ωtechnique owns good accuracy for the thermal conductivity measurement for solid bulks and hundreds of microns thick wafers.This new technique has potential application value in the thermal conductivity measurement where the conventional 3ωtechnique is not applicable as samples with porous structures.

关 键 词：独立探头 3ω技术 热导率 固体 

分 类 号：TB942[一般工业技术—计量学]