静电无阀微泵两种仿真模型的比较研究  

Comparing research on two different numerical models of electrostatically actuated valveless micropump

作　　者：林谢昭[1,2] 应济[2] 陈子辰[2] 

机构地区：[1]福州大学机械自动化学院,福州350002 [2]浙江大学机械与能源工程学院,杭州310027

出　　处：《哈尔滨工业大学学报》2010年第12期1943-1947,共5页Journal of Harbin Institute of Technology

基　　金：国家自然科学基金资助项目(50475104);浙江省自然科学基金资助项目(Z106519);福建省教育厅资助项目(JB07007)

摘　　要：为提高无阀微泵性能,分别采用全耦合模型(FCM)和预先定义泵膜位移的模型(PDM)对基于扩散/收缩单元的静电无阀微泵的动态特性进行计算仿真.对泵膜变形形状、泵膜中点位移、泵腔内压力以及进出口处流量等的变化历程进行比较.结果表明:PDM模型计算费用较低,但无法以较高精度近似泵膜变形的动态特性,进而导致错误的瞬态流场结果.要准确仿真微泵的动态特性,必须考虑电-结构-流场之间的相互作用.To improve the performance of electrostatically actuated valveless micropump,simulation of its dynimic characteristics have been conducted by full electrostatic-mechanic-fluidic coupled model（CFM） and prescribed deformations model（PDM）respectively.By comparing the calculated results of diaphragm deflections,transient variations of central displacements,chamber pressures and flow rate of inlet/outlet,it can be concluded that the PDM has lower cost and inadequate precision,but some distorting dynamic characteristics may be resulted from;The FCM can predict the transient behaviors of the micropump quite well since the effects of electro-mechanical coupling and fluid-structural interaction have been considered,but the computation cost is much more expensive.

关 键 词：静电无阀微泵 静电-结构-流体耦合 MEMSCAD 

分 类 号：TH16[机械工程—机械制造及自动化] TN405[电子电信—微电子学与固体电子学]