平面反射镜光学薄膜的制备  

Preparation of Plane Reffection Mirror Optical Thin Films

作　　者：王保松 刘军成 陈静 

机构地区：[1]江苏金陵机械制造总厂,江苏南京211100

出　　处：《光电技术应用》2010年第6期22-24,共3页Electro-Optic Technology Application

摘　　要：以薄膜原理为基础,通过Essential Macleod软件进行膜系设计.采用电子束加热蒸发的镀膜方式,利用设计工装制备了介质ZrO2-SiO2高反射膜层和金属铝反射膜层.介质高反膜层在1.064μm波长处的反射率达到95%,金属铝反射膜层的在3μm～5μm波段内的平均反射率超过95%.膜层的技术指标和环境适应性能具有优质的质量.Coatings were designed by Essential Macleod software based on the theory of film.High reflective ZrO2-SiO2 dielectric coating and reflective aluminum coating were made using the design clothes by electron beam heating evaporation coating method.The reflectivity of dielectric coating is up to rate of 95% in wavelength of 1.064 μm,and the average reflectivity of aluminum coating is over 95% between 3 μm and 5 μm.The technical parameters and environmental adaptability of the film are excellent.

关 键 词：平面反射镜 光学薄膜 反射率 

分 类 号：TB43[一般工业技术]