三坐标测量机气浮导轨引起的动态误差  

Dynamic error generated by air-bearing guide of coordinate measuring machine

作　　者：杨洪涛[1] 刘勇[1] 费业泰[2] 陈晓怀[2] 

机构地区：[1]安徽理工大学机械工程学院,安徽淮南232001 [2]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《沈阳工业大学学报》2011年第1期74-78,92,共6页Journal of Shenyang University of Technology

基　　金：国家自然科学基金资助项目(50675057)

摘　　要：为了分析弱刚度气浮导轨对测量机动态测量误差的影响,根据三坐标测量机气浮导轨分布情况和摩擦力特点,应用动力学知识对气浮导轨弱刚度和单边驱动引起的动态测量误差的传递路径、影响因素、表现形式进行系统的研究,推导了单边驱动引起的气浮导轨振动变形振幅的理论计算公式.分析结果表明,振动的主要激励是驱动力与惯性力形成的力偶,振幅大小与驱动加速度波动相关.应用谱分析方法对数据进行处理,验证了理论分析结果,气浮导轨振动引起的动态测量误差是测量机误差的主要成分之一,各误差分量相关性较强,测量机存在最佳测量速度.In order to analyze the effect of the weak rigidity air-bearing guide on the dynamic measurement error of coordinate measuring machine（CMM）,the transmission path,influencing factor and representing form of the dynamic measurement error generated by the air-bearing guide weak rigidity and single-side drive were systematically researched based on mechanical kinetics.The theoretical calculation formula for the amplitude of air-bearing guide vibration deformation caused by single-side drive was deduced.The analysis result reveals that the main stimulation of vibration is the force couple produced by driving force and apparent force,and the vibration amplitude is related to the fluctuation in driving acceleration.The theoretical analysis result is verified through adopting the spectral analytical method to process the experimental data.The dynamic measurement error caused by air-bearing guide vibration is a main constituent of CMM error.Various errors show the higher correlation,and the CMM has the optimal measuring speed.

关 键 词：三坐标测量机 弱刚度 气浮导轨 单边驱动 振动 加速度波动 谱分析 动态测量误差 

分 类 号：TH701[机械工程—仪器科学与技术]