基于形状记忆合金的微小型光热驱动马达  

Miniature optothermal drive motor based on shape memory alloy

作　　者：史斌[1] 赵冬伟[1] 张冬仙[1] 章海军[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光学仪器》2011年第1期74-77,共4页Optical Instruments

基　　金：国家863计划资助项目(2006AA04Z237)

摘　　要：在分析了形状记忆合金双程记忆效应原理的基础上,采用铜锌铝双向记忆合金片,设计并加工制作了两种微小型光热驱动马达,对其进行了驱动实验研究。研究结果表明,用输出波长为1064nm的YAG脉冲激光作为光热驱动马达的驱动源,在适当的输出功率和频率下,棘轮棘爪型光热驱动马达可获得较精确的步距,齿轮传动型光热驱动马达可获得较高的转速。这类用激光作为驱动源的微小型光热驱动马达易于小型化,真正实现无线遥控,有望在微光机电系统获得广泛应用。On the basis of analyzing the principle of two-way memory effect of the shape memory alloy, two miniature optothermal motors are designed and manufactured using sheets of Cu-Zn-Al two-way shape memory alloy. Experiments are carried out to test their driving performance. The experiment results demonstrate that when using a 1064nm YAG pulsed laser with an appropriate output power and frequency as the motors＇ driving source, the ratchet-pawl-type optothermal motor can have a precise step distance and the geaptype optothermal motor can have a high rotational speed. This kind of optothermal motors could be integrated and widely utilized in micro-optical-electromechanical systems wirelessly with remote controlling.

关 键 词：激光 形状记忆合金 光热驱动 马达 

分 类 号：O532.25[理学—等离子体物理] O436[理学—物理]