激光测距在面与面平行调节中的应用  

Application of Laser Measure to Level Two Planes

作　　者：赵喜清[1] 白璐[1] 张燕[1] 张永聪[1] 

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《电子工艺技术》2011年第2期111-114,共4页Electronics Process Technology

摘　　要：介绍一种采用激光测距原理实现面与面平行调节的设计方案。将激光传感器搭载在XY运动平台上,这样激光传感器测量就能在两个工作面间移动并测量二者的空间距离。传感器需要移动三个以上的位置,并在每个位置测量两个工作面间的距离,将这些距离值代入到平行调节算法中,得到两个工作面的角度偏差值。最后通过俯仰调节机构旋转这个角度值,最终实现这两个工作面的平行调节。Introduce the application of laser measurement to level two working planes.The laser sensor mounted on a XY stage can move between the two working planes and provide X-axis and Y-axis movements.The laser sensor should move to at least three positions where the Z distance should be measured separately between the two working planes,then using an algorithm of software to calculate the angular deviation between the two planes,at last the levelling will be achieved by swinging the pitch-and-roll adjustment unit.

关 键 词：激光测距 算法 俯仰调节 

分 类 号：TN249[电子电信—物理电子学]