一种新型电容式蓝宝石压力传感器  

A new type of capacitive pressure sensor using sapphire material

作　　者：宋国庆[1] 林金秋[2] 张莉新[1] 邹向光[1] 

机构地区：[1]中国电子科技集团公司第49研究所 [2]中国人民解放军95862部队

出　　处：《传感器世界》2011年第3期20-23,共4页Sensor World

摘　　要：介绍一种高精密、高稳定、线性度佳、结构简单的新型电容式蓝宝石压力传感器。以圆形C面(0001)取向蓝宝石片作为压力传感器的膜片和基片,并且采用两种方案改善普通电容式蓝宝石压力传感器的非线性特性。第一种方法是在一个基片中央区电极内制作一个圆形无金属电极区(圆形无电极区的直径与中央区电极的直径具有特定比率),提高线性度,改善灵敏度的一致性,但是它以降低传感器的灵敏度为代价的;第二种方法是在圆形基片表面中央区加工一个半球形凹槽,并且在该下凹区内不制作金属电极,能够牺牲很小的灵敏度或不降低灵敏度,换取较大的线性度提高和灵敏度一致性的改善。A new type of capacitive pressure sensor using sapphire material is developed in this paper, which has simple structure, high measuring accuracy, high stability and good linearity. The pressure sensing chip is composed of a circular diaphragm an a circular substrate which are made of sapphire with crystal orientation of C-plane （0001） . In order to improve the linearity of sapphire capacitive pressure sensor, two schemes are provided as follows： The first one is forming a circular no-metal-electrode region on the conventional central electrode region of substrate By this method, the linearity and consistence of sensitivity can be improved with the cost of reduced sensitivity. The second one is forming a semispherical concave groove on the central region of substrate and no metal electrode is fabricated in the groove . This method can improve the linearity and consistence of sensitivity greatly while the sensitivity may be reduced slightly or even no reduced.

关 键 词：电容式压力传感器 蓝宝石单晶 C面(0001)取向蓝宝石 R面(1 102)取向蓝宝石 半球形凹槽 中央电极内的无电极区 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]