Development on transparent conductive ZnO thin films doped with various impurity elements  

作　　者：ZHAO Lin SHAO Guangjie SONG Shitao QIN Xiujuan HAN Sihuizhi 

机构地区：[1]School of Environmental and Chemical Engineering, Yanshan University, Qinhuangdao 066004, China [2]State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao 066004, China [3]Hebei Normal University of Science and Technology, Qinhuangdao 066004, China

出　　处：《Rare Metals》2011年第2期175-182,共8页稀有金属（英文版）

基　　金：supported by the the Natural Science Foundation of Hebei Province,China (No.B2008000758)

摘　　要：A general review of recent research progress in fabricating transparent conductive ZnO thin films by means of intentional doping and codoping with In, Ga, A1, Mg, Li, F, H, N, and P, divided into metals and nonmetals, is presented in this article. The main emphasis is placed on introducing and discussing the recent research achievements on the mechanisms of the incorporation of these impurities, and their effects on the electrical and optical properties. Lastly, this article concludes with a summary of the present state of investigations on doping elements in fabricating functional ZnO thin films for photoelectric applications, and with our personal view of the perspective of future studies on doped ZnO thin films.A general review of recent research progress in fabricating transparent conductive ZnO thin films by means of intentional doping and codoping with In, Ga, A1, Mg, Li, F, H, N, and P, divided into metals and nonmetals, is presented in this article. The main emphasis is placed on introducing and discussing the recent research achievements on the mechanisms of the incorporation of these impurities, and their effects on the electrical and optical properties. Lastly, this article concludes with a summary of the present state of investigations on doping elements in fabricating functional ZnO thin films for photoelectric applications, and with our personal view of the perspective of future studies on doped ZnO thin films.

关 键 词：thin films conductive films zinc oxide DOPING electric properties optical properties 

分 类 号：TQ132.41[化学工程—无机化工] TQ174.42