基于线阵CCD的光谱仪定标研究  

Research on calibration of spectrometers based on linear CCD

作　　者：谢印忠[1,2] 庄松林[1] 张保洲[3] 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]临沂大学信息学院,临沂276005 [3]北京师范大学天文系北京市应用光学重点实验室,北京100875

出　　处：《仪器仪表学报》2011年第3期546-550,共5页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(A030801)资助项目

摘　　要：光谱仪是一种基本光谱检测和分析仪器,以线阵CCD为探测核心是设备微型化的重要手段,CCD各光敏像元输出信号与待测光谱波长及光谱辐射通量之间对应关系成为定标的主要内容。研究了常规线性拟合方法,应用校准结果测量发现有时误差较大,利用低压汞灯特征谱线为基准,采用最小二乘法曲线拟合完成波长定标,计算出拟合曲线的3阶校正参数;利用辐射标准灯完成光谱辐射定标,解决了光束经过光学系统传输损耗及线阵CCD光谱响应灵敏度测量的困难,并对定标方案进行了数学推导证明。对大量实验数据进行分析表明,该定标方法是切实可行的,并成功应用到微型光谱仪器的生产过程。Spectrometers play an important role in the domains of spectral measurements and analysis.In the development trend of miniaturization and portability,using linear CCD as the detector of spectrometers is the key technique.The main task of CCD spectrometer calibration is to obtain the relationships of wavelength vs.CCD pixel number and absolute spectral radiation flux vs.photon count.In the process of wavelength calibration,sometimes traditional linear fitting method may produce a large error.Using the emission spectra of a low pressure mercury lamp as the reference spectra,least square method is applied to determine the function of wavelength vs.CCD pixel number and the third order calibration parameters of the fitting curve are calculated.During the calibration of absolute spectral radiation flux,a standard radiation lamp is used as the calibration source,which solves the difficulties of determining the propagation loss and CCD spectral response.Mathematical deduction and experimental research show that this calibration method is effective and feasible.The proposed method has been successfully applied in the production of CCD spectrometers.

关 键 词：光学测量 线阵CCD 定标 最小二乘法 

分 类 号：TH741.4[机械工程—光学工程]