基于斜入射的平面度绝对检验方法  

Absolute flatness measurement method based on oblique incidence testing

作　　者：韩志刚 陈磊[1] 高波[2] 李建欣[1] 刘兆栋[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,南京210094 [2]成都精密光学工程研究中心,成都610041

出　　处：《仪器仪表学报》2011年第3期707-712,共6页Chinese Journal of Scientific Instrument

基　　金：江苏省333高层次人才培养项目(短相干光涉测量的理论与应用研究)资助

摘　　要：为了获得高反射率光学平面的绝对面形分布,提出了基于斜入射的平面度绝对检验方案。该方法通过菲索干涉仪的空腔干涉以及两次斜入射测量得到三组波面数据,使用Zernike多项式对波面拟合,通过求解待测表面的旋转不变量和旋转因变量获得整个平面的绝对面形分布。测量90 mm口径的镀铝反射镜,其绝对检验结果为0.266λ(PV),0.075λ(RMS)。讨论了测试中斜入射角及旋转角的选取方法,并分别选择45°和54°进行测试。基于斜入射的平面度绝对检验方法操作步骤简单,特别适合于高反射率光学表面的绝对面形检测。To determine absolute flatness distribution of optical surfaces with high reflectivity,a test method based on oblique incidence is proposed.Three sets of wavefront data are achieved through cavity interference measurement with a Fizeau interferometer and two oblique incidence measurements.The absolute flatness distribution of the whole test surface is obtained through calculating the rotational invariant component and rotational variant component of the surface.The absolute flatness of a mirror coated with aluminum with a diameter of 90 mm was measured in experiment,and the results are 0.266λ（PV） and 0.075λ（RMS）.The selection method of the oblique incident angle as well as the rotation angle is discussed;and tests were carried out using two angles of 45° and 54°,respectively.The proposed method is especially suitable for the absolute flatness measurement of optical surfaces with high reflectivity.

关 键 词：干涉测量 绝对检验 斜入射 ZERNIKE多项式 

分 类 号：TH744.3[机械工程—光学工程]