BST铁电厚膜的丝网印刷制备工艺研究  

Study on the process of screen-printed BST thick films

作　　者：汪竞阳[1] 余琳[1] 章天金[1] 潘瑞琨[1] 马志军[1] 

机构地区：[1]湖北大学材料科学与工程学院,湖北武汉430062

出　　处：《湖北大学学报（自然科学版）》2011年第1期94-97,共4页Journal of Hubei University：Natural Science

基　　金：国家自然科学基金项目(50762022)资助

摘　　要：对丝网印刷制备BST铁电厚膜工艺中的粉体合成、浆料配置、烧结条件等进行了研究,采用X射线衍射、透射电镜和扫描电子显微镜及配套的能谱仪对制备的BST粉体与厚膜样品的微观结构、成分进行测试分析.结果表明,在氧化铝衬底上一次印刷湿膜,经1 230-1 260℃烧结0.5 h后可获得单相钙钛矿结构,平均晶粒尺寸可达0.5μm且厚度约为10μm的BST铁电厚膜.The process of screen printing BST thick films was studied.The structural and morphological properties of the BST powders and thick films were examined by X-ray diffraction（XRD） and scanning electron microscopy（SEM）.Energy dispersive X-ray spectroscopy（EDS） was used to analyze the diffusion between the thick films and the substrate.It was found that the BST thick films which were screen printed on alumina substrates showed the well polycrystalline structure after sintered between 1 230-1 260 ℃ for 0.5 h.The average grain size is about 0.5 μm and the thickness of the films is approximately 10 μm.

关 键 词：BST 铁电厚膜 丝网印刷 

分 类 号：TB34[一般工业技术—材料科学与工程]