超声喷雾热分解法制备p型氧化锌多晶薄膜  

Preparation of p-type polycrystalline ZnO thin films by ultrasonic spray pyrolysis method

作　　者：郑春蕊[1,2] 

机构地区：[1]石家庄经济学院材料科学与工程研究所,河北石家庄050031 [2]北京理工大学材料科学与工程学院

出　　处：《无机盐工业》2011年第4期24-26,共3页Inorganic Chemicals Industry

基　　金：河北省科技厅科学技术研究与发展指导计划项目(07215157);河北省教育厅科学研究计划项目(Z2007425);石家庄经济学院校内项目(XN200706)

摘　　要：采用超声喷雾热分解法在玻璃衬底上以醋酸锌水溶液[Zn(CH3COO)2·2H2O]、醋酸铵(CH3COONH4)和硝酸铝[Al(NO3)3·9H2O]的混合溶液为前驱体生成了N-Al共掺p型氧化锌薄膜。考察了前驱体溶液浓度、载气流速、热解温度对实验结果的影响。用XRD和SEM测试手段对薄膜进行了晶体结构和表面形貌的表征,结果表明所制备的薄膜为六角纤锌矿结构的氧化锌薄膜,表面均匀,结构致密,具有强烈的呈c轴垂直于衬底的(002)择优取向。对薄膜进行了电学测试和光致发光性能测试,结果表明制备的薄膜为p型氧化锌薄膜,薄膜的光致发光明显具有氧化锌薄膜的特点。p - type N - Al co〈toped ZnO thin films were deposited on quartz glass substrates by ultrasonic spray pyrolysis method from a mixed aqueous solution of Zn （ CH3 COO ）2 · 2H2 O, CH3 COONH4, and Al { NO3 ） 3 · 9H2O. Effects of precursor solution concentration,flow rate of carrier gas,and pyrolysis temperature on the experiment result were studied. XRD and SEM were employed to characterize the crystalline structure and surface morphology of prepared ZnO thin films. Results indicated that the ZnO thin films belonged to hexagonal wurtzite structure,had a uniform surface , dense structure, and a strong preferred orientation（ 002 ）with the c axis perpendicular to the substrates. Photoluminescence performances and electrical properties of the thin films had been tested and the results indicated that the films were p - type ZnO thin films and their photol had obvious features of ZnO thin films

关 键 词：ZNO p型传导 喷雾热分解 N-Al共掺 光致发光 

分 类 号：TQ132.41[化学工程—无机化工]