单模光纤与SOI纳米线波导耦合设计  

Coupling design between single-mode fiber and SOI nanophotonic waveguides

作　　者：曹敏[1] 陈够喜[1] 仝晓刚[1] 

机构地区：[1]中北大学电子与计算机科学技术学院,山西太原030051

出　　处：《电子测试》2011年第3期5-10,共6页Electronic Test

基　　金：山西省研究生优秀创新项目(项目编号:20103083)资助

摘　　要：波导光栅在集成光学发展中扮演着重要的角色。与其他的耦合方法相比,光栅耦合器具有耦合效率高、制备封装成本低、无需芯片端面抛光、可以在任何地方实现信号输入输出等优点,成为纳米光波导最有潜力的耦合方法。本文提出利用OPTIFDTD软件仿真结合MATLAB编程的方法精确计算光栅耦合效率的新方法。仿真分析了光栅的周期、槽深、占空比、SiO2层厚度等光栅参数对耦合效率的影响,并给出了使输入光栅耦合器耦合效率达到42.6%;输出光栅耦合器的耦合效率达到72.3%的一组最佳光栅参数。Waveguide grating structures have been playing an important role in the development of integrated optics. Compared with other nanophotonic coupling strategies, grating coupling owns higher coupling efficiency, enables wafer scale testing of the integrated circuits and holds the promise of low-cost packaging, etc. All these advantages make it the most promising method for the integrated optical circuits. Come up with a new approach of calculating coupling efficiency exactly, which is based on using MATLAB programming combined with OPTIFDTD simulating. Discuss the impact of grating parameters on coupling efficiency, and educe the optimal structure. Coupling efficiency of 42.6% and 72.3% are achieved by simulation.

关 键 词：集成光学 SOI纳米线波导 光栅耦合器 耦合效率 

分 类 号：TN814[电子电信—信息与通信工程]