多目标拓扑优化设计在纳米定位平台中的应用  

Application of Multi-objective Topology Optimization Design on the Nano-positioning Stage

作　　者：陈立国[1,2] 张洋[1] 陈涛[2] 荣伟彬[1] 孙立宁[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,黑龙江哈尔滨150001 [2]中国科学院上海微系统与信息技术研究所传感技术国家重点联合实验室,上海200050

出　　处：《压电与声光》2011年第2期228-231,共4页Piezoelectrics & Acoustooptics

基　　金：国家杰出青年基金资助项目(50725518);新世纪优秀人才支持计划基金资助项目(NCET-08-0170);国家"八六三"计划基金资助项目(2009AA04Z323)

摘　　要：纳米定位平台在微型机械和精密仪器的设计和制造领域起着重要作用。该文将拓扑优化引入到压电陶瓷驱动的一维纳米定位平台设计中,并利用多目标设计方法对平台的运动和结构需求进行了优化,采用楔形预紧结构对压电陶瓷进行紧密预紧。经有限元仿真和实验验证,该实验系统输出位移达10μm,定位精度5 nm,耦合误差小于1%。实验证明,该方法为纳米定位平台的设计和制造提供了一种新颖、灵活、有效的方法。The nano-positioning stage has played an increasingly important role in the design and manufacture of the micro-mechanism and precision instruments.The topology optimization method has been applied to the design of the one-dimension nano-positioning stage drived by the piezoelectric ceramic（PZT） and the requirements of the stage kinematics and structure has been optimized by using the multi-objective design method in this work.The wedge-shaped structure as a preloading was used to achieve the precision pretension of the PZT.The finite element method simulation and experimental verification showed that the experimental system has better performance of the stroke displacement output of up to 10 μm,5 nm of the positioning accuracy and less than 1% of the coupling error.This method provides a novel,flexible,and efficient way in the design and optimization of the nano-positioning stage.

关 键 词：纳米定位平台 拓扑优化 多目标设计 楔形预紧 

分 类 号：TN804[电子电信—信息与通信工程] TP24[自动化与计算机技术—检测技术与自动化装置]