利用1070nm光纤激光器加工氧化铝陶瓷精密划线  

Research of Ceramic Precise Scribing by Fiber Laser

作　　者：闵大勇[1,2] 李勇 张显斌[3] 卢飞星 

机构地区：[1]华中科技大学激光加工国家工程研究中心,湖北武汉430074 [2]武汉华工激光工程有限责任公司,湖北武汉430223 [3]西安理工大学理学院,陕西西安710048

出　　处：《应用激光》2010年第6期488-492,共5页Applied Laser

摘　　要：传统的激光器作为光源对Al_2O_3陶瓷进行划线时,线宽满足不了精密划线的加工要求。现采用光纤激光作为光源对Al_2O_3陶瓷进行了划线的实验研究,分析了不同工艺参数对划线效果的影响。在功率100W,占空比30%,速度2400mm/min,频率800Hz,气压0.15Mpa的参数下,获得了20um的划线宽度、0.22mm的划线深度的划线样品。结合实际加工要求,给出了最佳的工艺参数,并提出了后续尚待改进的问题。The traditional lasers as light source, on A12O3 ceramic scribing, the line width can not meet the requirement of pre- cise scribing. In this paper, experiment research on A12 03 ceramic scribing by fiber laser has been studied. The processing effects influenced by different parameters also has been discussed. At the parameter of 100w power,30% duty ratio,2400mm/ min speed,800Hz frequence,0.15Mpa pressure, we get an ideal scribing sample with 20urn of line width, 0.22ram of scribing depth, light of the actual processing requirements, the optimum processing parameters were given, and made fllow-up has yet to be improving.

关 键 词：Al_2O_3陶瓷 划线 光纤激光 工艺参数 

分 类 号：TN248[电子电信—物理电子学]