Development of x-ray scintillator functioning also as an analyser grating used in grating-based x-ray differential phase contrast imaging  

作　　者：雷耀虎 刘鑫 郭金川 赵志刚 牛憨笨 

机构地区：[1]Key Laboratory of Optoelectronics Devices and Systems of Ministry of Education,Institute of Optoelectronics,Shenzhen University

出　　处：《Chinese Physics B》2011年第4期222-227,共6页中国物理B（英文版）

基　　金：supported by the Major Program of the National Natural Science Foundation of China (Grant No. 60532090)

摘　　要：In order to push the grating-based phase contrast imaging system to be used in hospitM and laboratories, this paper designs and develops a novel structure of x-ray scintillator functioning also as an analyser grating, which has been proposed for grating-based x-ray differential phase contrast imaging. According to this design, the scintillator should have a periodical structure in one dimension with the pitch equaling the period of self-image of the phase grating at the Talbot distance, where one half of the pitch is pixellated and is made of x-ray sensitive fluorescent material, such as CsI（T1）, and the remaining part of the pitch is made of x-ray insensitive material, such as silicon. To realize the design, a deep pore array with a high aspect ratio and specially designed grating pattern are successfully manufactured on 5 inch silicon wafer by the photo-assisted electrochemical etching method. The related other problems, such as oxidation-caused geometrical distortion, the filling of CsI（T1） into deep pores and the removal of inside bubbles, have been overcome. Its pixel size, depth and grating pitch are 3 p.m^7.5 ~m, 150 p^m and 3 Ixm, respectively. The microstructure of the scintillator has been examined microscopically and macroscopically by scanning electron microscope and x-ray resolution chart testing, respectively. The preliminary measurements have shown that the proposed scintillator, also functioning as an analyser grating, has been successfully designed and developed.In order to push the grating-based phase contrast imaging system to be used in hospitM and laboratories, this paper designs and develops a novel structure of x-ray scintillator functioning also as an analyser grating, which has been proposed for grating-based x-ray differential phase contrast imaging. According to this design, the scintillator should have a periodical structure in one dimension with the pitch equaling the period of self-image of the phase grating at the Talbot distance, where one half of the pitch is pixellated and is made of x-ray sensitive fluorescent material, such as CsI（T1）, and the remaining part of the pitch is made of x-ray insensitive material, such as silicon. To realize the design, a deep pore array with a high aspect ratio and specially designed grating pattern are successfully manufactured on 5 inch silicon wafer by the photo-assisted electrochemical etching method. The related other problems, such as oxidation-caused geometrical distortion, the filling of CsI（T1） into deep pores and the removal of inside bubbles, have been overcome. Its pixel size, depth and grating pitch are 3 p.m^7.5 ~m, 150 p^m and 3 Ixm, respectively. The microstructure of the scintillator has been examined microscopically and macroscopically by scanning electron microscope and x-ray resolution chart testing, respectively. The preliminary measurements have shown that the proposed scintillator, also functioning as an analyser grating, has been successfully designed and developed.

关 键 词：scintillator screen pore arrays oxidation CsI（T1） analyser grating 

分 类 号：O434.19[机械工程—光学工程]