变包含角平面光栅单色器的性能检测  

Performance measurement for variable-included-angle plane grating monochromators

作　　者：马磊[1,2] 卢启鹏[1] 彭忠琦[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,应用光学国家重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光电子．激光》2011年第4期589-592,共4页Journal of Optoelectronics·Laser

基　　金：国家重大科学工程项目上海光源工程资助项目(SS-06)

摘　　要：针对高分辨变包含角平面光栅单色器(VAPGM)工作在超高真空环境下需具有极高的精度,本文基于自准直法,研究了VAPGM波长扫描机构转角精度、光斑水平漂移重复精度以及光栅切换机构重复精度的检测方法。利用该方法完成了VAPGM的离线检测,其中,波长扫描机构平面镜(PM)和平面光栅(PG)的转角精度检测结果分别为0.19″、0.22″,满足设计指标0.43″。并且,光斑水平漂移重复精度以及光栅切换机构重复精度的检测结果也均达到了理论设计指标,表明了检测方法的有效性。A simple variable-included-angle plane grating monochromator（VAPGM） has been installed in Shanghai Synchrotron Radiation Facility（SSRF）.High accuracy of this monochromator is needed under the ultra-high vacuum environment.Measurement and calibration are very important.The rotation-angle-accuracy measurement,repeatability of the light spot transversal shift and the grating switching mechanism are investigated by auto-collimation method in this paper.The performance of the VAPGM is successfully achieved out of beamline.The results show that rotation-angle-accuracies of the plane mirror（PM） and the plane grating（PG） are measured to be 0.19″and 0.22″,respectively,satisfying the technical requirement of 0.43″.The repeatability of the grating switching mechanism and the light spot transversal shift also satisfying the technical requirements.Experimental results further indicate that the measurement method is effective.

关 键 词：同步辐射 变包含角平面光栅单色器(VAPGM) 转角精度 光斑水平漂移 光栅切换 

分 类 号：TH744[机械工程—光学工程]