面发射半导体激光器自混合振动测量实验研究  

Experimental study of self-mixing vibration measurement using VCSELs

作　　者：吕亮[1] 张可[1] 戴绩俊[1] 朱军[1] 甄胜来[1] 俞本立[1] 徐军[2] 谢建平[2] 赵天鹏[2] 明海[2] 

机构地区：[1]安徽大学光电信息获取与控制教育部重点实验室,安徽合肥230039 [2]中国科学技术大学光子技术研究所:安徽合肥230026

出　　处：《光电子．激光》2011年第4期593-596,共4页Journal of Optoelectronics·Laser

基　　金：安徽省教育厅重点科研计划资助项目(KJ2010A019);教育部留学回国人员科研启动基金资助项目

摘　　要：采用新型垂直腔面发射激光器(VCSEL)作为激光自混合振动测量系统的激光光源,针对不同驱动信号频率(1 kHz,2 kHz)、驱动信号幅度(880 mV,1.66 V)的振动驱动信号对激光自混合振动测量信号系统进行实验研究,并与通过激光稳态方程所获得的激光自混合振动信号仿真进行了比较分析。结果表明,2 kHz相对1 kHz驱动信号产生的自混合振动信号在相同时间周期内具有2倍的波数,而振动物体的振动频率驱动信号幅度为0.88 mV时激光自混合振动信号单振动周期内的波数约恰为驱动信号幅度为1.66 V所产生激光自混合振动信号的1/2,因此可以通过激光自混合信号测量获得待测振动物体振动信息的测量。The laser interferometry based on self-mixing effect is well-established technique,and widely used to measure displacement,velocity,vibration and distance due to its ompactness,robustness,as well as low cost.We experimentally investigated the self-mixing interference produced by the feedback of light from a vibrated target into vertical-cavity surface-emitting lasers（VCSELs） for sensing applications,and a theoretical analysis by rate equation was proposed.In this paper,the self-mixing vibrometer employing driven signals with different frequencies（1 kHz,2 kHz） and amplitudes（880 mV,1.66 V） was also discussed.Results indicate that the wave number of self-mixing signal with 2 kHz driven signal is two times of that with 1 kHz driven signal during one period,while the wave number of self-mixing signal with 880 mV driven signal is half of that with 1.66 V driven signal during one period,so frequency and amplitude of the driven signal can be obtained by self-mixing signal measurement.

关 键 词：光学测量 垂直腔面发射激光器(VCSEL) 自混合 振动测量仪 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]