基于MEMS矢量水听器微弱信号提取电路的设计与测试  

Weak Signal Extraction Circuit Design and Test Based on MEMS Vector Hydrophone

作　　者：王建平[1] 张国军[1] 薛晨阳[1] 关凌纲[1] 赵雷[1] 姚荣国[2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室 [2]中国人民解放军76324部队

出　　处：《仪表技术与传感器》2010年第7期74-77,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(50535030)

摘　　要：文中介绍了一种基于纤毛式MEMS矢量水听器微弱信号提取电路。该电路采用两级信号放大,两级之间设计二阶巴特沃斯低通滤波器。该电路设计经电路仿真软件进行仿真和水下测试。测试结果表明:该微弱信号提取电路可以很好地对水听器采集到的信号进行放大,表现为水听器的接收灵敏度为-160 dB(0 dB=1 V/μPa)。采用这种电路设计的MEMS矢量水听器不仅具有令人满意的"8"字形方向特性,而且具有良好的低频特性,可以满足低频声学测试需要。A weak signal extraction circuit based on cilia-type MEMS vector hydrophone was presented.This circuit was simulated by PSpice included two-stage amplifier and a second-order Butterworth low-pass filter between the two amplifier modules.According to the results of underwater measurement,the circuit can be as a well module for the amplication of vector hydrophone signal and its receiver sensitivity is as high as-160 dB（0 dB=1 V/μP）.The MEMS vector hydrophone with this design not only possesses the directional pattern in the form of ＂8＂shape,but also has the good lowfrequency characteristic to meet the needs of low-frequency acoustic measurement.

关 键 词：MEMS矢量水听器 微弱信号提取 电路设计测试 

分 类 号：TP721.1[自动化与计算机技术—检测技术与自动化装置]