高Q平面环形微腔二氧化碳激光熔融分析  

Analysis of High-Q Optical Microtoroid Cavity by CO_2 Laser

作　　者：贾鹏飞[1] 闫树斌[1] 郭涛[1] 刘俊[1] 熊继军[1] 

机构地区：[1]中北大学电子测试技术国防重点实验室,仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《传感技术学报》2011年第3期463-466,共4页Chinese Journal of Sensors and Actuators

基　　金：国家973前期研究专项项目(2009CB326206);国家自然科学基金项目(60707014,60778029,50975266);重点实验室基金项目(9140C1204040909);总装创新项目(7130907);山西省自然科学基金项目(200911059-16,2010011003-2);山西省高等学校优秀青年学术带头人项目

摘　　要：高Q值的光学微腔,近年来受到广泛的关注。由于其极高的品质因数和WGM模式,被广泛的应用于低阈值激光,微腔量子动力学,微腔生化传感器等领域。采用MEMS工艺制备平面微盘腔,通过建立物理模型和温度场分析了微盘腔在激光下的温度分布情况,通过拉曼频移测试了环形腔的热应力。实验结果表明激光处理表面后的微环腔应力为张力,而且距离环中心越远应力越大,最后测试得到微腔品质因数为4.8×105,耦合效率在95%以上。Recently high-Q optical cavity has been widely researched.As the microcavity inherited the high optical quality and WG mode,it was popular in low threshold laser,electrodynamics（QED）experiments,nonlinear optics,as well as bio-chemical sensing.MEMS technology was used for manufacture microdisk cavity.We designed physical model and analyzed the temperature distribution theoretically.Furthermore,thermal stress of different microtoroids under CO2 laser has been tested with Raman Spectral Analyzer.The results showed that the further the distance from the center of the cavity,the bigger the intermolecular tension is.Quality factor of the microtoroidal cavity was also tested by taper evanescent-field coupling.According to the testing results,the average value can be up to 4.8×105 and the coupling efficiency is 95%.

关 键 词：光学微腔 品质因素 激光处理 拉曼频移 

分 类 号：TN302[电子电信—物理电子学]