新型应变式厚膜力传感器及其应用  

The Application of the New Strain Type Thick Film Force Transducer

作　　者：马以武[1] 常慧敏[1] 

机构地区：[1]中国科学院合肥智能机械研究所,安徽合肥230031

出　　处：《自动化仪表》1999年第10期21-23,共3页Process Automation Instrumentation

基　　金：国家"八五"重点科技攻关项目

摘　　要：介绍一种可用于称重与测力的电阻应变式厚膜力传感器.其弹性体采用95%Al_2O_3陶瓷双孔梁、应变电阻为钌酸盐厚膜应变电阻,并运用厚膜工艺将应变电阻直接印刷、烧结在弹性体上而形成整体.它的量程最高达500N,精度为0.05%,工作温度达-40～+120℃.A resistance strain type thick film force transducen which can be used for weighing and force measurement is introduced . The elastomer of the transducer is made of 95 % Al2O3 ceramic beam with dual holes and the strain resistance is ruthenate thick film resistance. The strain resistance is printed and sintered directly on the elastomer by using thiclhfilm technique and integrated as an entirety. The measuring range is up to 500N with accuracy of 0.05 % , the operating temperature is - 40 ~ + 120℃.

关 键 词：力传感器 陶瓷双孔梁 厚膜应变电阻 传感器 

分 类 号：TH823.032[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]