单片机和脉宽调制控制的斜坡高压电源的研制  

Study on a High Voltage Source with Gradually Rised Output Voltage

作　　者：陶慧斌[1] 戎华[1] 李俊峰[1] 张声良[1] 

机构地区：[1]西安交通大学微电子工程系,西安市710049

出　　处：《仪表技术与传感器》1999年第10期15-16,19,共3页Instrument Technique and Sensor

摘　　要：提出了静电键合中渐近加压的思想，并研制成功了用单片机控制、以脉宽调制（ＰＷＭ）技术为基础的渐近加压的斜坡高压电源。实践证明，使用该电源进行静电键合能显著改善静电键合的质量，从而大大提高静电键合的合格率。We introduced an idea which is the anode voltage should be gradully raised in field-assisted bonding in this paper ,and have made a high voltage source with gradually rised output voltage by the technique of microcontroller and PWM. Experiment proved : Using such voltage source can remarkablly improved the qualitity of bonding and greatlly increase the passing-ratio of bonding.

关 键 词：静电键合 单片机 脉宽调制 斜坡高压电源 传感器 

分 类 号：TP368.203[自动化与计算机技术—计算机系统结构]