非硅MEMS惯性开关弹道特性  

The Ballistic Characteristics of Non-silicon MEMS Inertia Switch

作　　者：刘浩伯[1] 戴黎红[1] 康兴国[1] 谷雨桐[1] 

机构地区：[1]西安机电信息研究所,西安710065

出　　处：《科学技术与工程》2011年第10期2362-2366,共5页Science Technology and Engineering

摘　　要：针对国内缺乏对MEMS惯性开关弹道特性仿真研究这一问题,利用ANSYS软件对一种新型非硅MEMS惯性开关进行仿真研究,获得这种惯性开关弹道特性的仿真结果。结果验证了这种新型的非硅MEMS惯性开关具有高可靠性、更灵敏的碰目标响应,可进一步研究其实用价值。For the problem that the domestic lack of ballistic characteristics simulation research of the MEMS inertial switch,the simulation of the ballistic characteristics of a new kind of non-silicon MEMS inertia are made with ANSYS software,the ballistic characteristics simulation results of this kind inertial switch are gotten.The results prove that this new kind of non-silicon MEMS inertia switch has high reliability,response of touch target sensitively,can study its useful value further.

关 键 词：非硅MEMS惯性开关 弹道特性 碰目标响应 可靠性 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]