用自动划痕仪测定硬质镀层的结合强度  

Measuring Adhesive Strength of Hard Coatings with an Automatic Scratch Tester

作　　者：张平余[1] 刘洪[1] 王秀娥[1] 顾则鸣[1] 侯企贤[2] 肖永东[2] 

机构地区：[1]中国科学院兰州化学物理研究所固体润滑开放研究实验室 [2]中国科学院兰州化学物理研究所计算机应用研究室

出　　处：《固体润滑》1989年第4期224-229,共6页

摘　　要：作者利用自制的自动划痕试验仪对通过等离子增强化学气相沉积法(PECVD)制备的TiN和TiC镀层进行了划痕试验,考察了底材硬度、镀层厚度、镀层硬度、加载速率、划痕速度及压头(亦称划针)、与镀层间的摩擦状况等因素对表征镀层结合强度的临界载荷的影响。结果表明,临界载荷随底材硬度及镀层硬度的增加而增大,镀层厚度存在一个最佳值,在此值下的临界载荷最大,当加载速率高于100N/min时,临界载荷基本不再受其影响,临界载荷与划痕速度无关,镀层上覆盖固体润滑剂可使临界载荷增大,而覆盖纯油对临界载荷没有影响。The scratch test for PECVD TiNand TiC coatings using a self-made automatic scratch tester has been, conducted by the authors. The influences of substrate hardness, coatisng hardne,ss, coating thickness, loading rate, scratch speed and the, friction i state between the indenter ( scratcher) and coatings on critical, load,which cha- racters the adhesive strength of coatings, have been studied. The results show that the critical loads of hard coatings increase:s1w.ith increasing of substrate hardness and coating hardness,but with .an optimum coating thipkn.ess, the maximum critical load exists. Since loading rate is higher tluwi 100 N/min, it has no effect on critical load. The critical load is independent of the scratch speed. A solid lubricant film on hard coating can increase its critical load, but a lubricating oil does not have this effect.

关 键 词：硬质镀层 结合强度 测定 划痕仪 

分 类 号：TG174.44[金属学及工艺—金属表面处理]